| 摘要 |
An electron beam generating apparatus is provided to obtain a desired output beam from a filament and improve a lifetime of the filament by fixing both ends of the filament to a first and second electrodes without deforming a screw part of the filament. An electron beam generating apparatus includes a first and second electrodes(100,200), a first and second filament loading parts(141,240), a filament(400), and a fixing member. The first and second electrodes are coupled with each other in an insulating state. The first and second filament loading parts include a first and second loading surfaces and are formed on the first and second electrodes. Both ends of the filament are loaded on the first and second loading surfaces. The fixing member is used for fixing both ends of the filament to the first and second filament loading parts. At least one of the first and second loading surfaces is formed in parallel to a plane including both ends of the filament. |
