发明名称 POSITIVE PHOTOSENSITIVE RESIN COMPOSITION CONTAINING POLYMER HAVING RING STRUCTURE
摘要 <p>[PROBLEMS] To provide a positive photosensitive resin composition which has high sensitivity and is reduced in film thickness reduction in unexposed areas and which, after film formation, retains a high transmission and a film thickness even through high-temperature burning or treatment with a liquid resist stripper and does not crack during ITO sputtering; and a cured film suitable for use as a film material for various displays. [MEANS FOR SOLVING PROBLEMS] The positive photosensitive resin composition comprises: ingredient (A) which is an alkali-soluble acrylic polymer having at least one of carboxy and phenolic hydroxy and at least one of hydroxy other than phenolic hydroxy and amino having active hydrogen and having a number-average molecular weight of 2,000-30,000; ingredient (B) which is an alkali-soluble resin having a ring structure in the backbone; ingredient (C) which is a compound having a vinyl ether group; ingredient (D) which is a compound having a blocked isocyanate group; ingredient (E) which is a photo-acid generator; and a solvent (F). The cured film is obtained from the composition.</p>
申请公布号 WO2007145249(A1) 申请公布日期 2007.12.21
申请号 WO2007JP61903 申请日期 2007.06.13
申请人 NISSAN CHEMICAL INDUSTRIES, LTD.;HATANAKA, TADASHI;KOBAYASHI, JUNPEI 发明人 HATANAKA, TADASHI;KOBAYASHI, JUNPEI
分类号 G03F7/039;G03F7/004;H01L21/027 主分类号 G03F7/039
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