发明名称 |
METHOD AND SYSTEM FOR BRINGING IN/OUT OF SUBSTRATE, AND PHOTOSENSITIVE LAMINATE MANUFACTURING APPARATUS |
摘要 |
<p>A substrate cooling section (30) is provided downstream from a bonding section (29) which bonds a photosensitive web (7) to a glass substrate (3) so as to produce a bonded substrate (20). The substrate cooling section (30) includes a bonded substrate stocker (68) having a plurality of substrate storage chambers (76) each of which stores the bonded substrate (20), and a bring in/out robot (69) which brings uncooled bonded substrates (20) from the bonding section into the bonded substrate stocker (68) while bringing out and conveying cooled bonded substrates (20) from the bonded substrate stockers (68) to a base peeling section (31). All the substrate storage chambers (76) are separated into either a normal storage area or a buffer area. When the base peeling section (31) falls into trouble, the substrates at a substrate heating section (28) and the bonding section (29) are stored in the buffer area.</p> |
申请公布号 |
WO2007145265(A1) |
申请公布日期 |
2007.12.21 |
申请号 |
WO2007JP61956 |
申请日期 |
2007.06.07 |
申请人 |
FUJIFILM CORPORATION;SUGIHARA, RYOICHI;MORI, RYO |
发明人 |
SUGIHARA, RYOICHI;MORI, RYO |
分类号 |
H01L21/677 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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