| 摘要 |
<p>Provided is a substrate inspecting device, which can shorten its inspection time period and which has a highly efficient circuit for the inspection. The substrate inspecting device (21) comprises first and second current feeding terminals (22, 23), first and second voltage measuring terminals (24, 25), a current feeding unit (26), a voltage measuring unit (27) and a voltage stabilizing unit (28), thereby to inspect a substrate having a plurality of wiring patterns (29). The voltage stabilizing unit (28) is connected with the second voltage measuring terminal (25), thereby to stabilize voltages of the second voltage measuring terminal (25) and the contact portions of the wiring patterns (29) with the voltage measuring terminal (25). More specifically, the voltage stabilizing unit (28) is constituted to include an operation amplifier (41).</p> |
