发明名称 |
METHODS AND SYSTEMS FOR DETECTING DEFECTS ON A SPECIMEN USING A COMBINATION OF BRIGHT FIELD CHANNEL DATA AND DARK FIELD CHANNEL DATA |
摘要 |
<p>Various methods, carrier media, and systems for detecting defects on a specimen using a combination of bright field channel data and dark field channel data are provided. One computer-implemented method includes combining pixel-level data acquired for the specimen by a bright field channel and a dark field channel of an inspection system. The method also includes detecting defects on the specimen by applying a two-dimensional threshold to the combined data. The two-dimensional threshold is defined as a function of a threshold for the data acquired by the bright field channel and a threshold for the data acquired by the dark field channel.</p> |
申请公布号 |
WO2007146798(A2) |
申请公布日期 |
2007.12.21 |
申请号 |
WO2007US70749 |
申请日期 |
2007.06.08 |
申请人 |
KLA-TENCOR TECHNOLOGIES CORPORATION;LESLIE, BRIAN;KULKARNI, ASHOK |
发明人 |
LESLIE, BRIAN;KULKARNI, ASHOK |
分类号 |
G06K9/00 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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