APPARATUS FOR INSPECTING ELECTRIC CONDITION AND METHOD OF MANUFACTURING THE SAME

摘要

An electric test device and its manufacturing method are provided to perform the electric test even at a high frequency region by installing a supporter which is made of a material having a low dielectric rate to support partially a beam of an electric contact part. A first substrate(10) comprises a first surface(10a), a second surface(10b), and wiring(11) for connecting the first and the second surfaces electrically. An electric contact part(12) is located on the first surface of the first substrate. And the electric contact part comprises a beam(12a) for offering elasticity, and comprises a tip(12b) which is located above the beam, and contacted with a test target directly. A supporter(14) made of a low dielectric material is inserted between the first surface and the beam to support the beam. An electricity connector(16) connects the beam to the wiring electrically.