摘要 |
A method is provided for making an inductor comprising forming a catalytic material (14) over a substrate (12); and creating a network of one dimensional nanostructures (30) on the catalytic material, the network providing an inductance when a voltage is applied thereacross. This inductor is described in three applications: as an on-chip inductor for electronic circuitry, as a magnetic sensor, and as an environmental sensor. Several embodiments are described herein for forming networks of nanostructures on or above the substrate that provide an inductance having a high Q and a reduced die size for RF circuits. Several embodiments are also described for use of the nanostructure to sense gasses, radiation, a magnetic field, and the like. |
申请人 |
MOTOROLA INC.;THOMAS, SHAWN, G.;ILDEREM, VIDA;MANIAR, PAPU, D.;MARACAS, GEORGE, N. |
发明人 |
THOMAS, SHAWN, G.;ILDEREM, VIDA;MANIAR, PAPU, D.;MARACAS, GEORGE, N. |