APPARATUS AND METHOD FOR PUMPING IN AN ION OPTICAL DEVICE

摘要

An apparatus and method for differential pumping of a mass spectrometer or other ion-optical device provides a transverse pressure drop introduced across a face of a primary rotor of a turbomolecular pump by placement of one or more partitions in close proximity to the face of the primary rotor. Thus, two or more regions of space within the vacuum chamber having respective different pressures is achieved with a single pump.