发明名称 MAGNETIC HEAD AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a magnetic head wherein the diameter of a coil for recording is reduced to miniaturize the magnetic head and magnetic loss is suppressed and which is provided with excellent characteristics. SOLUTION: A method includes a step of forming a plating seed layer 20 for forming the coil 14 on a lower layer 16 and forming the coil 14 on the plating seed layer by electroplating using the plating seed layer as a plating electricity supplying layer, a step of patterning a resist 24 for forming a lower magnetic pole and a back gap part in such a state that the plating seed layer 20 is left on the surface, a step of removing an exposed part of the plating seed layer 20 by using the resist 24 as a mask and exposing a region where the lower magnetic pole and the back gap part are to be formed in the lower part 16 and a step of forming the lower magnetic pole and the back gap part in the lower layer 16 by electroplating using the plating seed layer 20 as the plating electricity supplying layer. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007328881(A) 申请公布日期 2007.12.20
申请号 JP20060160760 申请日期 2006.06.09
申请人 FUJITSU LTD 发明人 ONO TAKAHIDE;ITO TAKASHI
分类号 G11B5/31 主分类号 G11B5/31
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