| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine shape machining device capable of highly accurately measuring a minute force applied to a tool. SOLUTION: A machining part 13 has the tool 28 capable of machining a surface 1a of a workpiece 1 and a force sensor 24 which is connected to the tool 28, measures and outputs the force applied to the tool 28. A drive part 12 has an actuator connected to the machining part 13 so as to be able to drive the machining part 13 to the workpiece 1. A support part 11 supports the drive part 12. A displacement sensor 14 is provided on the support part 11 so as to be able to measure the displacement of the machining part 13 for the support part 11. A control part 15 is connected to the drive part 12 and can feedback control the drive part 12 based on the displacement measured by the displacement sensor 14. The control part 15 can control the drive part 12 based on a measuring device of the force output from the force sensor 24. COPYRIGHT: (C)2008,JPO&INPIT
|
