| 摘要 |
A micro-pump used for atomizing liquid is provided. The micro-pump includes a main-housing, a nozzle plate, and at least one actuator. The main-housing has a liquid inlet. The nozzle plate is assembled to the main-housing and has at least one nozzle. A first chamber is formed between the main-housing and the nozzle plate, and the nozzle and the liquid inlet are communicated with the first chamber. The actuator is disposed on the main-housing and/or the nozzle plate. The actuator drives the nozzle plate, so that liquid is filled into the first chamber and sprayed out through the nozzle. A micro-pump system can be formed by many micro-pumps.
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