| 摘要 |
PROBLEM TO BE SOLVED: To reduce a circuit scale and a cost of a signal processing circuit for signal processing of a sensor signal, in a magnetic bearing unit. SOLUTION: This magnetic bearing unit 1 is provided with a magnetic levitation part provided with a rotary shaft for rotation-supporting a rotor, and a motor for rotating the rotary shaft, and for noncontact-supporting the rotor with respect to a stator, a rotation detecting part for detecting a magnetic pole position of the motor, a rotor temperature detecting part for detecting a temperature of the rotor, a carrier wave generating part for supplying the carrier wave to respective sensors provided in the magnetic levitation part, the rotation detecting part and the rotor temperature detecting part, and an A/D conversion part for sampling the sensor signals output from the respective sensors synchronizedly with the carrier wave, in a vacuum pump for sucking and discharging gas by rotation of the rotor formed with rotary vanes. A correspondence relation on phases between respective AM-modulated waves of the respective sensor output signals can be fixed in the respective sensors provided in the magnetic levitation part, the rotation detecting part and the rotor temperature detecting part, by receiving the supply of the carrier wave generated by the common carrier wave generating part. COPYRIGHT: (C)2008,JPO&INPIT
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