| 摘要 |
An air knife and a substrate drying system using the same are provided to dry a substrate in the substrate drying system efficiently by changing the outlet angle of the air knife by a guide and reduce a length of the air knife by reducing the vertical angle of the air knife. An air knife of a substrate drying system includes an air knife body(210), a guide(200), and an outlet(220). The guide inclines a gas injection direction in a lower direction in the air knife body. A buffer(240) is additionally included in the air knife so that gas flowed into the air knife can stay. The substrate drying system includes a process chamber and a substrate transfer unit, and the air knife. The process chamber provides space for performing a substrate dry process. The substrate transfer unit transfers the substrate into the process chamber. The air knife dries the substrate transferred by the substrate transfer unit. |
