| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate for diffraction grating on which a diffraction grating pattern is formed with high accuracy and to provide a method of manufacturing the substrate for diffraction grating. <P>SOLUTION: The substrate 10 for diffraction grating is used in the method of manufacturing a diffraction grating substrate 1 including: a coating process in which the upper face 10b of the substrate 10 for diffraction grating is coated by a photosensitive material layer 15; an exposure process in which the photosensitive material layer 15 is partially exposed to laser light 51 radiated from top; and a removing process in which the part of the photosensitive material layer 15 or the other part thereof is removed, wherein the laser light 51 incident from the upper face 10b of the substrate 10 for diffraction grating is repeatedly reflected at least twice on the lower face 10a of the substrate 10 for diffraction grating. <P>COPYRIGHT: (C)2008,JPO&INPIT |
