| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing tape and a polishing device capable of easily performing an early detection of defective polishing tape and quality control by eliminating a mis-replacement of the polishing tape. SOLUTION: The polishing device which polishes a workpiece by using the polishing tape comprises a reel core 20 where the polishing tape T is wound, reel plates 21, 22 having a flange 23 fitting to the reel core for holding the reel core from both sides, and a storage element for storing the data related to the polishing tape, and the storage element is provided on the reel core. COPYRIGHT: (C)2008,JPO&INPIT |
