DISCHARGE TYPE GAS TREATMENT APPARATUS AND GAS TREATMENT METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a discharge type gas treatment apparatus in which the gate width of a switching element can be controlled according to variation of a state in a gas treatment part.

SOLUTION: The discharge type gas treatment apparatus 31 is equipped with a temperature measuring part 32 and a control part 33. The temperature measuring part 32 is disposed inside a discharge part 13 and always measures the temperature inside the discharge part 13, creates temperature measuring signals showing the measured temperature, and supplies the created signals to the control part 33 in a discharge power source 14 via a signal line 34. The control part 33 controls the timing (gate width) of a switch 25 outputting a high voltage pulse in the discharge power source 14 based on the temperature measuring signals supplied via the signal line 34 from the temperature measuring part 32, namely controls the switch 25 to open when a resonance period of a charge circuit has ended.

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