PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, AND INK-JET RECORDING HEAD

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric element excellent in fatigue properties and piezoelectric properties, to provide a piezoelectric actuator, and to provide an ink-jet recording head which use the piezoelectric element.

SOLUTION: The piezoelectric element has a piezoelectric film and a pair of electrodes which make contact with the piezoelectric film on a substrate, where the piezoelectric film has a structure in which lead-based piezoelectric films and non-lead piezoelectric films are laminated, and the furthest layer of the piezoelectric film from the substrate and the nearest layer of the piezoelectric film to the substrate are the non-lead piezoelectric films.

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