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发明名称
Verfahren zum Erhöhen der Produktionsausbeute durch Steuern der Lithographie auf der Grundlage elektrischer Geschwindigkeitsdaten
摘要
申请公布号
DE10355573(B4)
申请公布日期
2007.12.20
申请号
DE20031055573
申请日期
2003.11.28
申请人
ADVANCED MICRO DEVICES INC.
发明人
SELTMANN, ROLF;WAGNER, HEIKO;STEPHAN, ROLF
分类号
G03F7/00;G03F7/20;G06F17/50;H01L21/66
主分类号
G03F7/00
代理机构
代理人
主权项
地址
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