| 摘要 |
A vacuum dry apparatus is provided to prevent a spot from being formed on a substrate due to a vacuum pressure difference in a chamber by using a pressure regulating member, when a small or large area substrate is dried. A dry vessel(2) has a chamber(C) in which a drying operation is carried out. An exhaust port(P) is provided on an outer surface of the dry chamber, and communicates with the dry chamber. A vacuum pump(P1) is connected to the exhaust port, and generate vacuum pressure in the dry chamber via the exhaust port. A pressure regulating member(6) has a pressure regulating wall(W) protruding downwardly from an upper surface of the dry chamber to reduce the vacuum pressure.
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