| 摘要 |
<P>PROBLEM TO BE SOLVED: To perform a highly precise position detection of a sub-pixel unit, in a short period of time. <P>SOLUTION: A partial image 2B similarity of which to a known template image 22 is the highest is searched by the pixel from among an object image 21 (S2), first data of a one-dimensional signal waveform are genrtated by integrating each pixel value of the partial image 2b in a prescribed direction (S3), second data in a one-dimensional signal waveform are generated by integrating each pixel value of the template image in the prescribed direction, and one or more third data which have shifted the second data by the sub-pixel are generated (S5). By using the first data, the second data, and the third data, the amount of displacement between the template image and the partial image is calculated by the sub-pixel (S6), and on the basis of the amount of displacement and a position of the partial image 2B, coinciding positions with the template image in the object image are determined (S7). <P>COPYRIGHT: (C)2008,JPO&INPIT |
