发明名称 POLYIMIDE PRECURSOR COPOLYMER, VARNISH CONTAINING THE SAME, POSITIVE PHOTOSENSITIVE RESIN COMPOSITION, POLYIMIDE COPOLYMER, SEMICONDUCTOR ELEMENT PROTECTIVE FILM CONTAINING THE SAME AND METHOD FOR PRODUCING FINE PATTERN OF POLYIMIDE COPOLYMER CONTAINING FILM
摘要 <P>PROBLEM TO BE SOLVED: To provide a technology related to a polyimide precursor copolymer or a polyimide copolymer actualizing high transparency, high modulus of elasticity and excellent solvent solubility in good balance. <P>SOLUTION: The polyimide precursor copolymer is obtained by copolymerizing a first acid dianhydride having a specific structure with a second acid dianhydride having a specific structure different from that of the first acid dianhydride and one or more kinds of diamines each containing one or two aromatic rings. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007314614(A) 申请公布日期 2007.12.06
申请号 JP20060143447 申请日期 2006.05.23
申请人 SUMITOMO BAKELITE CO LTD 发明人 HASEGAWA MASATOSHI;OKAMEI SHUSAKU;TAKAHASHI TAISUKE
分类号 C08G73/16;G03F7/004;G03F7/037;H01L21/027;H01L21/312 主分类号 C08G73/16
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