发明名称 CMOS WITH DUAL METAL GATE
摘要 Embodiments herein present a structure and method to make a CMOS with dual metal gates. Specifically, the CMOS comprises a first gate comprising a first metal and a second gate comprising a second metal. The first gate comprises a portion of a first transistor that is complementary to a second transistor that includes the second gate, wherein the first gate and the second gate are situated on the same substrate. Furthermore, the first metal produces a first threshold voltage characteristic, wherein the first metal comprises tantalum. The second metal produces a second threshold voltage characteristic that differs from the first threshold voltage characteristic, wherein the second metal comprises tungsten.
申请公布号 US2007278590(A1) 申请公布日期 2007.12.06
申请号 US20060306748 申请日期 2006.01.10
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ZHU HUILONG;LUO ZHIJIONG;PARK DAE-GYU
分类号 H01L29/76;H01L21/8238 主分类号 H01L29/76
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