TFT-LCD ARRAY SUBSTRATE STRUCTURE AND ITS MANUFACTURE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a TFT-LCD array substrate and its manufacture method. SOLUTION: The TFT-LCD array substrate with respect to the present invention is the TFT-LCD array substrate comprising a substrate and a pixel array adapted for the substrate. Any of pixels is provided with: a gate line and a gate electrode formed in the substrate; a gate insulating layer formed in the gate electrode; a semiconductor layer formed in the gate insulating layer; an ohmic contact layer formed in both sides of the semiconductor layer; an isolation insulating medium layer covering the substrate and the gate insulating layer except a part in which semiconductor layer is formed; a pixel electrode formed in the isolation isolating medium layer and the ohmic contact layer on the semiconductor layer; source and drain electrodes formed in the pixel electrode above the ohmic contact layer, respectively; and a passivation layer formed above the source and drain electrodes. Since the TFT-LCD array substrate is formed by three mask technology, simplification of manufacturing processes and improvement in the availability of a sputtering equipment are actualized. COPYRIGHT: (C)2008,JPO&INPIT