| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reflective liquid crystal display element with which a gap between reflection electrodes with a dimension equal to or less than photolithographic patterning limitation is formed with self aligning and reflectance of pixels is improved by forming the reflection electrodes with a laminated structure having a level difference caused by two conductive films, and a method for manufacturing the same. <P>SOLUTION: The reflection electrode 51 is constructed with a reflection electrode titanium 511 composed of a titanium film formed on a third interlayer film 29, and a reflection electrode aluminum 512 composed of an aluminum film formed on the reflection electrode titanium 511. Side walls of the reflection electrode aluminum 512 is more receded toward horizontal directions than those of the reflection electrode titanium 511. Side walls composed of gap forming oxide films 513 are formed only on the side walls inside the gap b of the reflection electrode aluminum 512, whereas they are not formed on the side walls of the reflection electrode titanium 511. <P>COPYRIGHT: (C)2008,JPO&INPIT |
