发明名称 Circuit, structure and method of testing a semiconductor, such as an integrated circuit
摘要 A method of testing an integrated circuit having a layout structure which includes a plurality of branch structures, the method comprising the steps of: (A) generating a control current in response to an input reference; (B) establishing a respective branch current through each of the plurality of branch structures when a process bias supports fabrication of a respective predetermined dimension associated with the branch structures; and (C) generating, in response to the branch currents, an output indicative of the process bias obtained during fabrication of the layout structure.
申请公布号 US6312964(B1) 申请公布日期 2001.11.06
申请号 US20000648221 申请日期 2000.08.25
申请人 CYPRESS SEMICONDUCTOR CORP. 发明人 MOYAL NATHAN Y.
分类号 G01R31/316;H01L23/544;(IPC1-7):G01R31/26;H01L21/66 主分类号 G01R31/316
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