发明名称 |
Circuit, structure and method of testing a semiconductor, such as an integrated circuit |
摘要 |
A method of testing an integrated circuit having a layout structure which includes a plurality of branch structures, the method comprising the steps of: (A) generating a control current in response to an input reference; (B) establishing a respective branch current through each of the plurality of branch structures when a process bias supports fabrication of a respective predetermined dimension associated with the branch structures; and (C) generating, in response to the branch currents, an output indicative of the process bias obtained during fabrication of the layout structure.
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申请公布号 |
US6312964(B1) |
申请公布日期 |
2001.11.06 |
申请号 |
US20000648221 |
申请日期 |
2000.08.25 |
申请人 |
CYPRESS SEMICONDUCTOR CORP. |
发明人 |
MOYAL NATHAN Y. |
分类号 |
G01R31/316;H01L23/544;(IPC1-7):G01R31/26;H01L21/66 |
主分类号 |
G01R31/316 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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