| 摘要 |
A processing apparatus and a processing method are provided to prevent a pressure failure of control valve due to an electrostatic discharge and to control certainly the pressure of a process chamber. A process object is processed with a process gas in a process chamber(24). A plurality of gas flow lines include a process gas supply line(30) for supplying the process gas into the process chamber and a process gas discharge line(31) for discharging the process gas from the process chamber. A diaphragm valve is provided on one of the gas flow lines. An antistatic agent source(43) is connected to the one gas flow line at a position upstream of the diaphragm valve to supply an antistatic agent.
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