| 摘要 |
PROBLEM TO BE SOLVED: To improve throughput by optimizing a collection method of a processed workpiece.SOLUTION: A method of processing a workpiece by using a processing device having a plurality of containers for housing workpieces, a plurality of processing chambers in which desired processing is performed on the workpieces, a temporary storing chamber for temporarily storing the workpieces, and a transfer device for transferring workpieces includes: a first step in which unprocessed workpieces are transferred from the plurality of containers to the plurality of processing chambers; a second step in which processed workpieces are transferred from the plurality of processing chambers to the temporary storing chamber; and a third step in which collection to the container is finished by sequentially collecting the processed workpieces to the container which starts to collect the processed workpieces from the temporary storing chamber in preference to the other containers in accordance with the timing of the processing to the final workpiece in any of the containers. |
