| 摘要 |
PROBLEM TO BE SOLVED: To detect movement of a high luminance part of a light source and to correct the position of the high luminance part on the basis of the detected result. SOLUTION: In a UV ray microscope 100, a secondary light source SS is formed by converging light emitted from the light source 11, and a sample 1 is irradiated with light from the secondary light source SS via the objective lens 3 where an incident pupil 3a is provided at the conjugate position of the secondary light source SS. The microscope 100 is provided with: a dichroic mirror 13 which branches and emits a part of light beams among light beams emitted from the light source 11 as non-illumination light; a light source image detecting part 7 which converges the non-illumination light and forms the light source image of the light source 11 on a substantially conjugate detection surface of the secondary light source SS, and which detects the light source image and outputs image intensity information; and a light source holding mechanism 27 which holds the light source 11 so as to be movable in the direction of an optical axis cross section. COPYRIGHT: (C)2008,JPO&INPIT
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