LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

摘要

A lithography apparatus and a method for manufacturing a device are provided to prevent discharge of bubbles interfering with an imaging by using a gas knife and pumps. A lower surface of a ring-shaped chamber(31) is formed by a porous plate(30). A liquid removing device is formed by the ring-shaped chamber around an innermost edge of a bottom surface of a seal member(12). A gas extracting ring(32) and a gas supplying ring(33) are arranged on an outside the ring-shaped chamber. The gas supplying ring has a narrow slit on the lower portion thereof. Air, artificial air, or flushing gas are provided under a pressure for forming a gas knife(34) with the gas out of the slit. The ring-shaped chamber is connected to pumps. The gas for forming the gas knife is extracted by the pumps connected to the gas extracting ring.