EXPOSURE DEVICE AND EXPOSURE METHOD

摘要

PROBLEM TO BE SOLVED: To provide an inexpensive exposure device in which a conveying device of a mask can be structured in a simple configuration and a large mask can be easily conveyed to a mask stage.

SOLUTION: A substrate stage 11 of the exposure device PE includes a substrate holding plate where a substrate W is mounted and a plurality of mask holding pins that are disposed as freely approaching and retreating from above the substrate holding plate and that hold a mask M. The plurality of mask holding pins hold the mask M while the mask M is supplied by a mask loader to the substrate stage 11 positioned at a loading position WP1 and the substrate stage 11 is moved from the loading position WP1 to a position below a mask stage 10 and attached to the mask stage 10.

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