摘要 |
An n-conductively doped source region ( 2 ) in a deep p-conducting well (DP), a channel region ( 13 ), a drift region ( 14 ) formed by a counterdoping region ( 12 ), preferably below a gate field plate ( 6 ) insulated by a gate field oxide ( 8 ), and an n-conductively doped drain region ( 3 ) arranged in a deep n-conducting well (DN) are arranged in this order at a top side of a substrate ( 1 ). A lateral junction ( 11 ) between the deep p-conducting well (DP) and the deep n-conducting well (DN) is present in the drift path ( 14 ) in the vicinity of the drain region ( 3 ) so as to avoid a high voltage drop in the channel region ( 13 ) during the operation of the transistor and to achieve a high threshold voltage and also a high breakdown voltage between source and drain.
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