发明名称 High-Voltage Nmos-Transistor and Associated Production Method
摘要 An n-conductively doped source region ( 2 ) in a deep p-conducting well (DP), a channel region ( 13 ), a drift region ( 14 ) formed by a counterdoping region ( 12 ), preferably below a gate field plate ( 6 ) insulated by a gate field oxide ( 8 ), and an n-conductively doped drain region ( 3 ) arranged in a deep n-conducting well (DN) are arranged in this order at a top side of a substrate ( 1 ). A lateral junction ( 11 ) between the deep p-conducting well (DP) and the deep n-conducting well (DN) is present in the drift path ( 14 ) in the vicinity of the drain region ( 3 ) so as to avoid a high voltage drop in the channel region ( 13 ) during the operation of the transistor and to achieve a high threshold voltage and also a high breakdown voltage between source and drain.
申请公布号 US2007278570(A1) 申请公布日期 2007.12.06
申请号 US20050659512 申请日期 2005.08.05
申请人 AUSTRIAMICROSYSTEMS AG 发明人 KNAIPP MARTIN;PARK JONG M.
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
代理机构 代理人
主权项
地址