| 摘要 |
PROBLEM TO BE SOLVED: To ensure that a backside gas is exhausted at high speed and insulated. SOLUTION: An insulative exhaust port 23 is mounted to a stage 12 on which an electrostatic absorption device 13 is disposed, and an extension tube 22 is installed to the exhaust port 23. A pin path 29, in which a hoisting pin 26 is disposed, is connected to an exhaust piping 21 through a bifurcation 28 within the exhaust port 23, with the exhaust piping 21 being connected to a vacuum exhaust system. The opening of the pin path 29 is formed at a position which superimposes the groove 35 of the electrostatic absorption device 13, and a residual gas in the groove 35 is evacuated not through an air piping 31 but through the pin path 29. A residual gas in the extension tube 22 is also evacuated without passing through the groove 35 and air piping 31. Exhaust conductance can be increased even if the conductance of the air piping 31 is small. COPYRIGHT: (C)2008,JPO&INPIT
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