发明名称 |
OBJECT INSPECTION APPARATUS, INCLINATION ADJUSTING MECHANISM THEREOF, METHOD FOR ADJUSTING INCLINATION THEREOF |
摘要 |
PROBLEM TO BE SOLVED: To carry out visual inspection by securing a focusing range according to the inclined state of an object of to be inspected. SOLUTION: The inspection apparatus is equipped with a camera turning portion 51 which inclines a camera body 12 photographing a chip 1 and an objective lens 65 and/or the chip 1; an X table 13; a Y table 14 and a micromotion adjuster 64 which make the linear movement of the camera body 12 and the object lens 65 and/or the chip 1; and a controller 70 which controls the camera turning portion 51 and the X table 13, the Y table 14, and the micromotion adjuster 64. The camera turning portion 51, the X table 13, the Y table 14 and the micromotion adjuster 64 is controlled so as to correspond to the inclination of the chip 1 previously measured with regard to the camera body 12 and the object lens 65. COPYRIGHT: (C)2008,JPO&INPIT
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申请公布号 |
JP2007317965(A) |
申请公布日期 |
2007.12.06 |
申请号 |
JP20060147326 |
申请日期 |
2006.05.26 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
YOSHII KOJI;UEDA YOICHIRO;FUKAE TAKAYUKI |
分类号 |
H01L21/66;G01N21/956;G03B17/56 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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