| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid immersion microscope in which an observation state is given without using the movement of a substrate and the spread of liquid into unnecessary portion (portion where the collection of liquid thereafter is impossible) around an observation point is prevented regardless of the state of the surface of the substrate (hydrophilicity/hydrophobicity). SOLUTION: The liquid immersion microscope is provided with: a liquid immersion type objective lens; a means (S2) which discharges a liquid to a non-observation point outside the observation point which is facing to the end of the objective lens on the surface of the substrate; and a means (S3) which sucks the liquid discharged to the non-observation point and moves the liquid to the observation point. COPYRIGHT: (C)2008,JPO&INPIT
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