FAST ATOM RADIATION SOURCE AND FAST ATOMIC BEAM DISCHARGING METHOD AND SURFACE REFORMING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a device in which a desired discharged atom density distribution in a unit time can be obtained economically and in a short time.

SOLUTION: A positive pole driving part 31a makes possible repetitive rotations with a center of a positive pole 2 as a rotating axis and a distance between the positive pole 2 and an atom discharging part is changed. A controlling part 32a receives an input data which is set to obtain a desired atom density distribution in accordance with a shift of the positive pole 2 and outputs to the positive pole driving part 31a a driving control signal for shifting the positive pole 2. Furthermore, the controlling part 32a stops the positive pole controlling part 31a while in operation, or changes a driving speed, or changes a staying time of each posture in the positive pole 2, and changes an atom density per unit time.

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