| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable highly accurate positioning of an optical element at specified position and attitude without being affected by deformation even if the optical element is deformed, by correcting the measured value of a position sensor or the position and attitude target value of the optical element according to the deformed shape, or arranging the position sensor at a position where it is not affected by deformation. <P>SOLUTION: The optical element driving device is provided with an optical element 1, a deformation mechanism for deforming the optical element, a driving mechanism for positioning the optical element, a sensor 6 that measures the position of a movable body including the optical element, and a controller for controlling the driving mechanism on the basis of a position target value and the measured value of a sensor. The controller corrects the position target value or the measured value of the sensor according to the deformation condition of the optical element, and controls the driving mechanism by using the corrected value. <P>COPYRIGHT: (C)2008,JPO&INPIT |
