发明名称 |
REVERSE SIDE CLEANING DEVICE OF AN OBJECT |
摘要 |
<p>The present invention relates to a reverse side cleaning device for an object, in that a cleaning work of a reverse side of an object can be performed by spraying a liquid through a plurality of injection nozzles simultaneously with a process of the object. The reverse side cleaning device for an object according to the present invention includes a spindle motor for rotating a drive shaft, the drive shaft rotated by the spindle motor, a waterway pipe penetrated through the drive shaft and the center of the spindle motor and forming a waterway, a plurality of injection nozzles mounted at an end portion of the waterway pipe, an object loading portion for placing the abject thereon and rotated according to the rotation of the drive shaft, a guide for fixing a girth of the object, and a drive shaft connection portion for connecting the object loading portion and the guide to the drive shaft. The reverse side of the object can be cleaned by spraying the liquid through the plurality of injection nozzles connected to the waterway simultaneously with the process of the object, so that the process time is shorted and the reverse side cleaning process is possible during the process thereof, whereby decreasing the defect rate.</p> |
申请公布号 |
WO2007139239(A1) |
申请公布日期 |
2007.12.06 |
申请号 |
WO2006KR02036 |
申请日期 |
2006.05.29 |
申请人 |
TRACOR CO., LTD.;YOUN, BYUNG TAE;CHOI, YOUNG GIL;KWON, YOUNG WOOK |
发明人 |
YOUN, BYUNG TAE;CHOI, YOUNG GIL;KWON, YOUNG WOOK |
分类号 |
H01L21/304 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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