Method for the production of thin substrates

摘要

The present invention is related to a method for producing a thin substrate, comprising
a. providing a mother substrate, the mother substrate having a first main surface;
b. inducing a predetermined amount of stress in at least a portion of the mother substrate, said portion comprising the thin substrate, the induced stress being locally larger than the toughness of the mother substrate;
such that the thin substrate is released from the mother substrate.