Electrostatic beam deflection scanner and beam deflection scanning method

摘要

The present invention provides for a beam deflection scanner (20) performs reciprocating deflection scanning with an ion beam or a charged particle beam to thereby periodically change a beam trajectory and comprises a pair of scanning electrodes (21A,21B) installed so as to be opposed to each other with the beam trajectory interposed therebetween and a pair of correction electrodes (27,28) installed in a direction perpendicular to an opposing direction of the pair of scanning electrodes, with the beam trajectory interposed therebetween, and extending along a beam traveling axis. Positive and negative potentials are alternately applied to the pair of scanning electrodes (21A,21B), while a correction voltage is constantly applied to the pair of correction electrodes (27,28). A correction electric field produced by the pair of correction electrodes (27,28) is exerted on the ion beam or the charged particle beam passing between the pair of scanning electrodes (21A,21B) at the time of switching between the positive and negative potentials.