发明名称 A APPARATUS FOR GUIDING A BASE PLATE
摘要 An apparatus for guiding a processed article to the inside of a surface treatment bath is provided to prevent a processed article from being deformed by resistance with process liquid by moving down a guide body after the processed article is inserted into the guide body and by soaking the processed article into process liquid. A vertical guide bar is vertically installed at one side of a surface treatment bath. A screw bar is rotatively supported by the vertical guide bar, rotated by power of an elevation motor. A first horizontal guide bar(100) is coupled to the screw bar so as to be elevated, vertically installed with respect to the vertical guide bar. A hanger bracket(600) vertically maintains a processed article(10) by a clamp(610), slidingly transferred along the first horizontal guide bar. An elevation bracket(350) is positioned under the hanger bracket wherein one end of the elevation bracket is fixed to an end part of the first horizontal guide bar. The processed article is inserted into a guide body for guiding the processed article. A first pusher unit transfers the hanger bracket along the first horizontal guide bar to insert the vertically maintained processed article into a gap between the first and the second horizontal guide bars.
申请公布号 KR20070114259(A) 申请公布日期 2007.11.30
申请号 KR20070114641 申请日期 2007.11.08
申请人 POINT TECHNOLOGY INC. 发明人 KIM, NAM SUNG
分类号 H01L21/304;H01L21/02 主分类号 H01L21/304
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