| 摘要 |
PROBLEM TO BE SOLVED: To obtain a carbon composite material for a reducing atmosphere furnace capable of exhibiting excellent reducing gas reaction inhibition effect even in a high temperature reducing gas atmosphere over 1,000°C and enabling a product life to be largely elongated and to provide a production method therefor. SOLUTION: The carbon composite material for the reducing atmosphere furnace has a TaC coating film of a crystalline structure comprising densely laminated fine particles formed on the surface of a graphite substrate by depositing a Ta fine particle together with a reactive gas particle containing C on the surface, wherein the graphite substrate has as a characteristic value, a thermal expansion coefficient in the range of the thermal expansion coefficient of the tantalum carbide coating film±2.0×10<SP>-6</SP>/k. The production method for the carbon composition material for the reducing atmosphere furnace is carried out by using metal Ta as a target material and the reactive gas containing C and forming the tantalum carbide coating film on the graphite substrate having the above thermal expansion coefficient as the characteristic value by an arc ion plating (AIP) type reactive vapor deposition method. COPYRIGHT: (C)2008,JPO&INPIT
|
