Vorrichtung zum Beschichten eines Substrats mit einer Absorberanordnung,申请号DE200550001694T-传众专利搜索

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发明名称	Vorrichtung zum Beschichten eines Substrats mit einer Absorberanordnung
摘要
申请公布号	DE502005001694(D1)	申请公布日期	2007.11.29
申请号	DE200550001694T	申请日期	2005.01.18
申请人	INTERPANE ENTWICKLUNGS- UND BERATUNGSGESELLSCHAFTMBH & CO KG	发明人	BOEWER, REIMUND;MOENNEKES, JOERG;HERLITZE, LOTHAR DR.
分类号	H01J37/32;C23C14/00;C23C14/56	主分类号	H01J37/32
代理机构		代理人
主权项
地址

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