| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To suppress the inclination of a contact surface of a ground electrode without increasing the plate thickness of a wall, even if distortion occurs on the wall due to a difference in pressure between the outside and a film-forming vacuum chamber. <P>SOLUTION: The communication hole of a fixed body 31 that is formed at the distorted center of a wall 15 due to a difference in pressure between a film-forming vacuum chamber 13 and the outside is concentrically positioned at the through-hole of the wall 15, and a supporting body 33 is driven along a rail 34 engaged with a guide 32 that includes two pairs of opposing reference surfaces vertical to the flat face of the fixed body 31. Thus, a flexible substrate 1 is stuck to the end face of a frame 54 while expanding and contracting an elastic body 35, forming a film forming chamber 5. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
