| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical apparatus with which a figure can be drawn with a light spot by driving a movable base on which an optical member to be irradiated with light is mounted. SOLUTION: A deviation between the output of a position sensor 103 given by detecting the movement of an optical member to be irradiated with light and a target position of the light spot available from a target position update filter 102 is derived from a subtraction part 105, and an electric current for canceling the deviation is derived at a drive control part 106. Further, an actuator current 110 is corrected to equalize the electric current output from the drive control part 106 to the electric current corresponding to the acceleration available from the target position update filter 102, and the movable base on which the optical member is mounted is driven by the actuator current 110. Thus, a figure having a stable configuration is drawn by the light spot. COPYRIGHT: (C)2008,JPO&INPIT
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