发明名称 STRIPPER COMPOSITION FOR PHOTORESIST
摘要 <p>A photoresist stripper composition, a method for stripping a photoresist containing aluminum copper or aluminum and copper on a substrate by using the composition, and a method for preparing a liquid crystal display device and a semiconductor device by using the stripping method are provided to improve the corrosion resistance to an under conductive metallic layer or insulating layer and to allow a photoresist to be removed clearly within a short time. A photoresist stripper composition comprises 1-95 wt% of a polar aprotic solvent. Preferably the polar aprotic solvent is N-methyl formamide, or a polar aprotic solvent mixture containing N-methyl formamide. Optionally the photoresist stripper composition comprises further at least one selected from 1-60 wt% of a water-soluble organic amine compound, 0.01-5 wt% of a corrosion inhibitor, and a water-soluble nonionic surfactant.</p>
申请公布号 KR20070114038(A) 申请公布日期 2007.11.29
申请号 KR20070050852 申请日期 2007.05.25
申请人 LG CHEM. LTD. 发明人 HAN, HEE;PARK, MIN CHOON;KIM, KYUNG JUN;SEO, SUNG WOO;KWON, HYOK JOON;AHN, KYOUNG HO;CHOI, BYUNG KYU;MIN, SUNG JOON;HWANG, JI YOUNG
分类号 G03F7/42;H01L21/027;H01L21/306 主分类号 G03F7/42
代理机构 代理人
主权项
地址