发明名称 |
STRIPPER COMPOSITION FOR PHOTORESIST |
摘要 |
<p>A photoresist stripper composition, a method for stripping a photoresist containing aluminum copper or aluminum and copper on a substrate by using the composition, and a method for preparing a liquid crystal display device and a semiconductor device by using the stripping method are provided to improve the corrosion resistance to an under conductive metallic layer or insulating layer and to allow a photoresist to be removed clearly within a short time. A photoresist stripper composition comprises 1-95 wt% of a polar aprotic solvent. Preferably the polar aprotic solvent is N-methyl formamide, or a polar aprotic solvent mixture containing N-methyl formamide. Optionally the photoresist stripper composition comprises further at least one selected from 1-60 wt% of a water-soluble organic amine compound, 0.01-5 wt% of a corrosion inhibitor, and a water-soluble nonionic surfactant.</p> |
申请公布号 |
KR20070114038(A) |
申请公布日期 |
2007.11.29 |
申请号 |
KR20070050852 |
申请日期 |
2007.05.25 |
申请人 |
LG CHEM. LTD. |
发明人 |
HAN, HEE;PARK, MIN CHOON;KIM, KYUNG JUN;SEO, SUNG WOO;KWON, HYOK JOON;AHN, KYOUNG HO;CHOI, BYUNG KYU;MIN, SUNG JOON;HWANG, JI YOUNG |
分类号 |
G03F7/42;H01L21/027;H01L21/306 |
主分类号 |
G03F7/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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