| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion source capable of generating ion beams with wide width, large beam current, and excellent uniformity of beam current distribution in width direction, and capable of prolonging a lifetime of the cathode. SOLUTION: The ion source 2a is provided with a plasma generating container 6 having an ion extraction port 8 extended in X direction, a magnet 14 to generate magnetic field 16 along the X direction in the container 6, side-heating type cathodes 20 which are arranged at both sides in X direction of the plasma generating container 6 and are used for generation of plasma 10 and for increase and decrease of density of the whole plasma 10 in the container 6, and a plurality of filament cathodes 32 which are installed along the X direction in the plasma generating container 6 and are used for generation of the plasma 10 and control of the density distribution of the plasma 10 in the container 6. COPYRIGHT: (C)2008,JPO&INPIT
|
