发明名称 METHODS OF MANUFACTURING INTERFEROMETRIC MODULATORS WITH THIN FILM TRANSISTORS
摘要 A modulator has a transparent substrate with a first surface. At least one interferometric modulator element resides on the first surface. At least one thin film circuit component electrically connected to the element resides on the surface. When more than one interferometric element resides on the first surface, there is at least one thin film circuit component corresponding to each element residing on the first surface. A method of manufacturing interferometric modulators with thin film transistors is also disclosed.
申请公布号 US2007275491(A1) 申请公布日期 2007.11.29
申请号 US20070837140 申请日期 2007.08.10
申请人 IDC LLC 发明人 CHUI CLARENCE;ZEE STEPHEN
分类号 H01L21/02 主分类号 H01L21/02
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