| 摘要 |
An apparatus for manufacturing a flat panel display is provided to check damage of a substrate by using a pressure detector connected to a vacuum line when the substrate is damaged. An apparatus for manufacturing a flat panel display includes a stone flat plate(110), a plurality of lift pins(120), a lift pin plate(130), a vacuum line(132), a pressure detector(150), and a driving part(140). The stone flat plate receives a substrate for processing. The plurality of lift pins have a vacuum shaft. The vacuum shaft passes through the stone flat plate and supports the substrate. The lift pin plate is installed on a lower part of the plurality of lift pins and fixes the lift pin. The vacuum line is connected to the vacuum shaft and passes through the lift pin plate. The pressure detector is connected to the vacuum line and detects a pressure of the vacuum shaft. The driving part is connected to the lift pin plate and lifts the lift pin plate. |
