| 摘要 |
A dummy substrate ( 17 ) differs from a substrate to be processed in having a first guide (G 1 ) for assisting centering, however, it can be handled as a substitute of the substrate to be processed. In a process chamber ( 2 ), a second guide (G 2 ) is arranged to assist the dummy substrate ( 17 ) to center. To detect a transfer shift of a transfer mechanism (TRM), at first, the dummy substrate ( 17 ) is centered to a placing table ( 14 ) on the placing table ( 14 ) or at an upper position thereof by engagement of the first and the second guides (G 1 , G 2 ). The dummy substrate ( 17 ) centered in such a manner is received by the transfer mechanism (TRM) and transferred to a detector ( 11 ). Then, a detection value of a decentering quantity and that in a decentering direction of the dummy substrate ( 17 ) are obtained by the detector ( 11 ), and a transfer shift of the transfer mechanism (TRM) is obtained based on the detection values.
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