| 摘要 |
PROBLEM TO BE SOLVED: To provide a making method of an imprint template. SOLUTION: The making method of the imprint template 44 comprises mounting a transfer layer on a substrate 30; mounting a layer of an imprintable medium 36 on the transfer layer; polymerizing the imprintable medium by exposing the imprintable medium to chemical rays using a master imprint template 38 in order to imprint a pattern on the imprintable medium; and etching the obtained polymer layer, the transfer layer and the substrate so that the imprinted pattern is transferred to the substrate. By this the substrate is converted to the imprint template having the pattern reverse to the pattern mounted on the master imprint template. COPYRIGHT: (C)2008,JPO&INPIT
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